| Measurement accuracy - Limit value probing error (form) [μm] | 5.0 |
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| Measurement accuracy - Limit value probing error (size) PS(TS) [μm] | 5.0 |
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| Measurement accuracy - Limit value length measurement error (3) [μm] | exaCT® S 80: 14.0 + L/40 (4)
exaCT® S 130: 6.9 + L/40 |
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| Measurement accuracy - Limit value sphere distance error (3) [μm] | exaCT® S 80: 9.0 + L/40
exaCT® S 130: 5.0 + L/40 |
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| Measuring range - Max. diameter [mm] | exaCT® S 80: 83
exaCT® S 130: 83 |
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| Measuring range - Height at max. diameter [mm] | exaCT® S 80: 40
exaCT® S 130: 36 |
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| Measuring range - Max. height [mm] | exaCT® S 80: 46
exaCT® S 130: 48 |
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| Measuring range - Scan-Volume TS (tomographic static) [dm3] | exaCT® S 80: 0.22
exaCT® S 130: 0.20 |
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| Max. workpiece weight rotary table (with centric load) [kg] | 5 |
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| Device weight [kg] | 380 |
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